3/27/2010	1:27:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/27/2010	1:27:10 PM	Recipe started at 1:27 PM
3/27/2010	1:27:10 PM	H2 valve closed
3/27/2010	1:27:10 PM	BCl3 valve closed
3/27/2010	1:27:10 PM	PH3 valve closed
3/27/2010	1:27:10 PM	SiCl4 pre valve closed
3/27/2010	1:27:10 PM	SiCl4 post valve closed
3/27/2010	1:27:10 PM	Main Vac valve closed
3/27/2010	1:27:10 PM	Bypass valve closed
3/27/2010	1:27:10 PM	Bubbler valve closed
3/27/2010	1:27:10 PM	Helium valve opened
3/27/2010	1:27:10 PM	Helium MFC set to  500.000000
3/27/2010	1:27:10 PM	H2 MFC set to  0.000000
3/27/2010	1:27:10 PM	BCl3 MFC set to  0.000000
3/27/2010	1:27:10 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:27:10 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:27:10 PM	Tube furnace set to 0
3/27/2010	1:28:30 PM	Helium valve closed
3/27/2010	1:28:30 PM	H2 valve closed
3/27/2010	1:28:30 PM	BCl3 valve closed
3/27/2010	1:28:30 PM	PH3 valve closed
3/27/2010	1:28:30 PM	SiCl4 pre valve closed
3/27/2010	1:28:30 PM	SiCl4 post valve closed
3/27/2010	1:28:30 PM	Main Vac valve closed
3/27/2010	1:28:30 PM	Bypass valve closed
3/27/2010	1:28:30 PM	Bubbler valve closed
3/27/2010	1:28:30 PM	Helium MFC set to  0.000000
3/27/2010	1:28:30 PM	H2 MFC set to  0.000000
3/27/2010	1:28:30 PM	BCl3 MFC set to  0.000000
3/27/2010	1:28:30 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:28:30 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:28:30 PM	Tube furnace set to 0
3/27/2010	1:28:30 PM	Run finished at 1:28 PM
3/27/2010	1:28:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/27/2010	1:36:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/27/2010	1:36:07 PM	Recipe started at 1:36 PM
3/27/2010	1:36:07 PM	Helium valve closed
3/27/2010	1:36:07 PM	H2 valve closed
3/27/2010	1:36:07 PM	BCl3 valve closed
3/27/2010	1:36:07 PM	PH3 valve closed
3/27/2010	1:36:07 PM	SiCl4 pre valve closed
3/27/2010	1:36:07 PM	SiCl4 post valve closed
3/27/2010	1:36:07 PM	Main Vac valve closed
3/27/2010	1:36:07 PM	Bubbler valve closed
3/27/2010	1:36:07 PM	Bypass valve opened
3/27/2010	1:36:07 PM	Helium MFC set to  0.000000
3/27/2010	1:36:07 PM	H2 MFC set to  0.000000
3/27/2010	1:36:07 PM	BCl3 MFC set to  0.000000
3/27/2010	1:36:07 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:36:07 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:36:07 PM	Tube furnace set to 0
3/27/2010	1:36:39 PM	Helium valve closed
3/27/2010	1:36:39 PM	H2 valve closed
3/27/2010	1:36:39 PM	BCl3 valve closed
3/27/2010	1:36:39 PM	PH3 valve closed
3/27/2010	1:36:39 PM	SiCl4 pre valve closed
3/27/2010	1:36:39 PM	SiCl4 post valve closed
3/27/2010	1:36:39 PM	Bubbler valve closed
3/27/2010	1:36:39 PM	Main Vac valve opened
3/27/2010	1:36:39 PM	Bypass valve opened
3/27/2010	1:36:39 PM	Helium MFC set to  0.000000
3/27/2010	1:36:39 PM	H2 MFC set to  0.000000
3/27/2010	1:36:39 PM	BCl3 MFC set to  0.000000
3/27/2010	1:36:39 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:36:39 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:36:39 PM	Tube furnace set to 0
3/27/2010	1:36:39 PM	Run finished at 1:36 PM
3/27/2010	1:36:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/27/2010	1:42:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/27/2010	1:42:36 PM	Recipe started at 1:42 PM
3/27/2010	1:42:36 PM	H2 valve closed
3/27/2010	1:42:36 PM	BCl3 valve closed
3/27/2010	1:42:36 PM	PH3 valve closed
3/27/2010	1:42:36 PM	SiCl4 pre valve closed
3/27/2010	1:42:36 PM	SiCl4 post valve closed
3/27/2010	1:42:36 PM	Main Vac valve closed
3/27/2010	1:42:36 PM	Bypass valve closed
3/27/2010	1:42:36 PM	Bubbler valve closed
3/27/2010	1:42:36 PM	Helium valve opened
3/27/2010	1:42:36 PM	Helium MFC set to  500.000000
3/27/2010	1:42:36 PM	H2 MFC set to  0.000000
3/27/2010	1:42:36 PM	BCl3 MFC set to  0.000000
3/27/2010	1:42:36 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:42:36 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:42:36 PM	Tube furnace set to 0
3/27/2010	1:43:56 PM	Helium valve closed
3/27/2010	1:43:56 PM	H2 valve closed
3/27/2010	1:43:56 PM	BCl3 valve closed
3/27/2010	1:43:56 PM	PH3 valve closed
3/27/2010	1:43:56 PM	SiCl4 pre valve closed
3/27/2010	1:43:56 PM	SiCl4 post valve closed
3/27/2010	1:43:56 PM	Main Vac valve closed
3/27/2010	1:43:56 PM	Bypass valve closed
3/27/2010	1:43:56 PM	Bubbler valve closed
3/27/2010	1:43:56 PM	Helium MFC set to  0.000000
3/27/2010	1:43:56 PM	H2 MFC set to  0.000000
3/27/2010	1:43:56 PM	BCl3 MFC set to  0.000000
3/27/2010	1:43:56 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:43:56 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:43:56 PM	Tube furnace set to 0
3/27/2010	1:43:57 PM	Run finished at 1:43 PM
3/27/2010	1:43:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/27/2010	1:44:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/27/2010	1:44:52 PM	Recipe started at 1:44 PM
3/27/2010	1:44:52 PM	Helium valve closed
3/27/2010	1:44:52 PM	H2 valve closed
3/27/2010	1:44:53 PM	BCl3 valve closed
3/27/2010	1:44:53 PM	PH3 valve closed
3/27/2010	1:44:53 PM	SiCl4 pre valve closed
3/27/2010	1:44:53 PM	SiCl4 post valve closed
3/27/2010	1:44:53 PM	Main Vac valve closed
3/27/2010	1:44:53 PM	Bubbler valve closed
3/27/2010	1:44:53 PM	Bypass valve opened
3/27/2010	1:44:53 PM	Helium MFC set to  0.000000
3/27/2010	1:44:53 PM	H2 MFC set to  0.000000
3/27/2010	1:44:53 PM	BCl3 MFC set to  0.000000
3/27/2010	1:44:53 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:44:53 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:44:53 PM	Tube furnace set to 0
3/27/2010	1:45:15 PM	Helium valve closed
3/27/2010	1:45:15 PM	H2 valve closed
3/27/2010	1:45:15 PM	BCl3 valve closed
3/27/2010	1:45:15 PM	PH3 valve closed
3/27/2010	1:45:15 PM	SiCl4 pre valve closed
3/27/2010	1:45:15 PM	SiCl4 post valve closed
3/27/2010	1:45:15 PM	Bubbler valve closed
3/27/2010	1:45:15 PM	Main Vac valve opened
3/27/2010	1:45:15 PM	Bypass valve opened
3/27/2010	1:45:15 PM	Helium MFC set to  0.000000
3/27/2010	1:45:15 PM	H2 MFC set to  0.000000
3/27/2010	1:45:15 PM	BCl3 MFC set to  0.000000
3/27/2010	1:45:15 PM	SiCl4 MFC set to  0.000000
3/27/2010	1:45:15 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	1:45:15 PM	Tube furnace set to 0
3/27/2010	1:45:15 PM	Run finished at 1:45 PM
3/27/2010	1:45:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/27/2010	1:54:46 PM	H2 MFC set to  5.000000
3/27/2010	1:54:50 PM	Helium MFC set to  95.000000
3/27/2010	1:54:58 PM	Main Vac valve closed
3/27/2010	1:54:58 PM	Bypass valve closed
3/27/2010	1:55:01 PM	Helium valve opened
3/27/2010	1:55:02 PM	H2 valve opened
3/27/2010	1:55:11 PM	Tube furnace set to 250
3/27/2010	2:01:07 PM	Bubbler valve opened
3/27/2010	2:40:58 PM	Helium MFC set to  200.000000
3/27/2010	2:40:59 PM	H2 valve closed
3/27/2010	2:41:13 PM	Tube furnace set to 0
3/27/2010	2:41:17 PM	H2 MFC set to  0.000000
3/27/2010	3:00:17 PM	Bubbler valve closed
3/27/2010	3:00:19 PM	Helium valve closed
3/27/2010	3:00:21 PM	Helium MFC set to  0.000000
3/27/2010	3:03:31 PM	Recipe started at 3:03 PM
3/27/2010	3:03:31 PM	Helium valve closed
3/27/2010	3:03:31 PM	H2 valve closed
3/27/2010	3:03:31 PM	BCl3 valve closed
3/27/2010	3:03:31 PM	PH3 valve closed
3/27/2010	3:03:31 PM	SiCl4 pre valve closed
3/27/2010	3:03:31 PM	SiCl4 post valve closed
3/27/2010	3:03:31 PM	Main Vac valve closed
3/27/2010	3:03:31 PM	Bypass valve closed
3/27/2010	3:03:31 PM	Bubbler valve closed
3/27/2010	3:03:31 PM	Helium MFC set to  0.000000
3/27/2010	3:03:31 PM	H2 MFC set to  0.000000
3/27/2010	3:03:31 PM	BCl3 MFC set to  0.000000
3/27/2010	3:03:31 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:03:31 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	3:03:31 PM	Tube furnace set to 250
3/27/2010	3:03:41 PM	Helium valve closed
3/27/2010	3:03:41 PM	H2 valve closed
3/27/2010	3:03:41 PM	BCl3 valve closed
3/27/2010	3:03:41 PM	PH3 valve closed
3/27/2010	3:03:41 PM	SiCl4 pre valve closed
3/27/2010	3:03:41 PM	SiCl4 post valve closed
3/27/2010	3:03:41 PM	Main Vac valve closed
3/27/2010	3:03:41 PM	Bypass valve closed
3/27/2010	3:03:41 PM	Bubbler valve closed
3/27/2010	3:03:41 PM	Helium MFC set to  0.000000
3/27/2010	3:03:41 PM	H2 MFC set to  0.000000
3/27/2010	3:03:41 PM	BCl3 MFC set to  0.000000
3/27/2010	3:03:41 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:03:41 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	3:03:41 PM	Tube furnace set to 0
3/27/2010	3:03:51 PM	Helium valve closed
3/27/2010	3:03:51 PM	H2 valve closed
3/27/2010	3:03:51 PM	BCl3 valve closed
3/27/2010	3:03:51 PM	PH3 valve closed
3/27/2010	3:03:51 PM	SiCl4 pre valve closed
3/27/2010	3:03:51 PM	SiCl4 post valve closed
3/27/2010	3:03:51 PM	Main Vac valve closed
3/27/2010	3:03:51 PM	Bypass valve closed
3/27/2010	3:03:51 PM	Bubbler valve closed
3/27/2010	3:03:51 PM	Helium MFC set to  0.000000
3/27/2010	3:03:51 PM	H2 MFC set to  0.000000
3/27/2010	3:03:51 PM	BCl3 MFC set to  0.000000
3/27/2010	3:03:51 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:03:51 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	3:03:51 PM	Tube furnace set to 1000
3/27/2010	3:04:01 PM	Helium valve closed
3/27/2010	3:04:01 PM	H2 valve closed
3/27/2010	3:04:01 PM	BCl3 valve closed
3/27/2010	3:04:01 PM	PH3 valve closed
3/27/2010	3:04:01 PM	SiCl4 pre valve closed
3/27/2010	3:04:01 PM	SiCl4 post valve closed
3/27/2010	3:04:01 PM	Main Vac valve closed
3/27/2010	3:04:01 PM	Bypass valve closed
3/27/2010	3:04:01 PM	Bubbler valve closed
3/27/2010	3:04:01 PM	Helium MFC set to  0.000000
3/27/2010	3:04:01 PM	H2 MFC set to  0.000000
3/27/2010	3:04:01 PM	BCl3 MFC set to  0.000000
3/27/2010	3:04:01 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:04:01 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	3:04:01 PM	Tube furnace set to 0
3/27/2010	3:04:11 PM	Run finished at 3:04 PM
3/27/2010	3:09:48 PM	Program started after a nonstandard shutdown
3/27/2010	3:09:48 PM	Helium valve closed
3/27/2010	3:09:48 PM	H2 valve closed
3/27/2010	3:09:48 PM	BCl3 valve closed
3/27/2010	3:09:48 PM	PH3 valve closed
3/27/2010	3:09:48 PM	SiCl4 pre valve closed
3/27/2010	3:09:48 PM	SiCl4 post valve closed
3/27/2010	3:09:48 PM	Main Vac valve closed
3/27/2010	3:09:48 PM	Bypass valve closed
3/27/2010	3:09:48 PM	Bubbler valve closed
3/27/2010	3:09:48 PM	Helium MFC set to  0.000000
3/27/2010	3:09:48 PM	H2 MFC set to  0.000000
3/27/2010	3:09:48 PM	BCl3 MFC set to  0.000000
3/27/2010	3:09:48 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:09:48 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	3:09:48 PM	Tube furnace set to 0
3/27/2010	3:10:10 PM	Program started after a nonstandard shutdown
3/27/2010	3:10:11 PM	Helium valve closed
3/27/2010	3:10:11 PM	H2 valve closed
3/27/2010	3:10:11 PM	BCl3 valve closed
3/27/2010	3:10:11 PM	PH3 valve closed
3/27/2010	3:10:11 PM	SiCl4 pre valve closed
3/27/2010	3:10:11 PM	SiCl4 post valve closed
3/27/2010	3:10:11 PM	Main Vac valve closed
3/27/2010	3:10:11 PM	Bypass valve closed
3/27/2010	3:10:11 PM	Bubbler valve closed
3/27/2010	3:10:11 PM	Helium MFC set to  0.000000
3/27/2010	3:10:11 PM	H2 MFC set to  0.000000
3/27/2010	3:10:11 PM	BCl3 MFC set to  0.000000
3/27/2010	3:10:11 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:10:11 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	3:10:11 PM	Tube furnace set to 0
3/27/2010	3:10:14 PM	Bypass valve opened
3/27/2010	3:10:15 PM	Bypass valve closed
3/27/2010	3:10:16 PM	Bypass valve opened
3/27/2010	3:10:16 PM	Bypass valve closed
3/27/2010	3:10:30 PM	Bypass valve opened
3/27/2010	3:10:32 PM	Bypass valve closed
3/27/2010	3:15:40 PM	Program started after a nonstandard shutdown
3/27/2010	3:15:40 PM	Helium valve closed
3/27/2010	3:15:40 PM	H2 valve closed
3/27/2010	3:15:40 PM	BCl3 valve closed
3/27/2010	3:15:40 PM	PH3 valve closed
3/27/2010	3:15:40 PM	SiCl4 pre valve closed
3/27/2010	3:15:40 PM	SiCl4 post valve closed
3/27/2010	3:15:40 PM	Main Vac valve closed
3/27/2010	3:15:40 PM	Bypass valve closed
3/27/2010	3:15:40 PM	Bubbler valve closed
3/27/2010	3:15:40 PM	Helium MFC set to  0.000000
3/27/2010	3:15:40 PM	H2 MFC set to  0.000000
3/27/2010	3:15:40 PM	BCl3 MFC set to  0.000000
3/27/2010	3:15:40 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:15:40 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	3:15:40 PM	Tube furnace set to 0
3/27/2010	3:15:48 PM	Program started after a nonstandard shutdown
3/27/2010	3:15:48 PM	Helium valve closed
3/27/2010	3:15:48 PM	H2 valve closed
3/27/2010	3:15:48 PM	BCl3 valve closed
3/27/2010	3:15:48 PM	PH3 valve closed
3/27/2010	3:15:48 PM	SiCl4 pre valve closed
3/27/2010	3:15:48 PM	SiCl4 post valve closed
3/27/2010	3:15:48 PM	Main Vac valve closed
3/27/2010	3:15:48 PM	Bypass valve closed
3/27/2010	3:15:48 PM	Bubbler valve closed
3/27/2010	3:15:48 PM	Helium MFC set to  0.000000
3/27/2010	3:15:48 PM	H2 MFC set to  0.000000
3/27/2010	3:15:48 PM	BCl3 MFC set to  0.000000
3/27/2010	3:15:48 PM	SiCl4 MFC set to  0.000000
3/27/2010	3:15:48 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	3:15:48 PM	Tube furnace set to 0
3/27/2010	3:16:01 PM	Bypass valve opened
3/27/2010	3:16:02 PM	Bypass valve closed
3/27/2010	3:16:02 PM	Bypass valve opened
3/27/2010	3:16:03 PM	Bypass valve closed
3/27/2010	3:16:12 PM	Bypass valve opened
3/27/2010	3:16:14 PM	Bypass valve closed
3/27/2010	3:16:26 PM	Program exited cleanly
3/27/2010	4:11:43 PM	Program started normally
3/27/2010	4:11:43 PM	There was an error trying to close the Helium valve.  It remains opened. 
3/27/2010	4:11:46 PM	There was an error trying to close the H2 valve.  It remains opened. 
3/27/2010	4:11:47 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
3/27/2010	4:11:47 PM	There was an error trying to close the PH3 valve.  It remains opened. 
3/27/2010	4:11:47 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
3/27/2010	4:11:51 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
3/27/2010	4:11:52 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
3/27/2010	4:11:52 PM	There was an error trying to close the Bypass valve.  It remains opened. 
3/27/2010	4:11:52 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
3/27/2010	4:11:52 PM	Helium MFC set to  0.000000
3/27/2010	4:11:52 PM	H2 MFC set to  0.000000
3/27/2010	4:11:52 PM	BCl3 MFC set to  0.000000
3/27/2010	4:11:52 PM	SiCl4 MFC set to  0.000000
3/27/2010	4:11:52 PM	Error setting the  Bypass solenoid MFC to 760.000000
3/27/2010	4:11:53 PM	Tube furnace set to 0
3/27/2010	4:12:28 PM	Program started after a nonstandard shutdown
3/27/2010	4:12:28 PM	There was an error trying to close the Helium valve.  It remains opened. 
3/27/2010	4:12:30 PM	There was an error trying to close the H2 valve.  It remains opened. 
3/27/2010	4:12:30 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
3/27/2010	4:12:30 PM	There was an error trying to close the PH3 valve.  It remains opened. 
3/27/2010	4:12:31 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
3/27/2010	4:12:31 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
3/27/2010	4:12:31 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
3/27/2010	4:12:32 PM	There was an error trying to close the Bypass valve.  It remains opened. 
3/27/2010	4:12:32 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
3/27/2010	4:12:32 PM	Helium MFC set to  0.000000
3/27/2010	4:12:32 PM	H2 MFC set to  0.000000
3/27/2010	4:12:32 PM	BCl3 MFC set to  0.000000
3/27/2010	4:12:32 PM	SiCl4 MFC set to  0.000000
3/27/2010	4:12:32 PM	Error setting the  Bypass solenoid MFC to 760.000000
3/27/2010	4:12:34 PM	Tube furnace set to 0
3/27/2010	4:12:58 PM	Program started after a nonstandard shutdown
3/27/2010	4:12:58 PM	There was an error trying to close the Helium valve.  It remains opened. 
3/27/2010	4:12:59 PM	There was an error trying to close the H2 valve.  It remains opened. 
3/27/2010	4:13:00 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
3/27/2010	4:13:00 PM	There was an error trying to close the PH3 valve.  It remains opened. 
3/27/2010	4:13:00 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
3/27/2010	4:13:00 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
3/27/2010	4:13:01 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
3/27/2010	4:13:01 PM	There was an error trying to close the Bypass valve.  It remains opened. 
3/27/2010	4:13:01 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
3/27/2010	4:13:01 PM	Helium MFC set to  0.000000
3/27/2010	4:13:01 PM	H2 MFC set to  0.000000
3/27/2010	4:13:01 PM	BCl3 MFC set to  0.000000
3/27/2010	4:13:01 PM	SiCl4 MFC set to  0.000000
3/27/2010	4:13:01 PM	Error setting the  Bypass solenoid MFC to 760.000000
3/27/2010	4:13:01 PM	Tube furnace set to 0
3/27/2010	4:22:58 PM	Program started after a nonstandard shutdown
3/27/2010	4:22:58 PM	Helium valve closed
3/27/2010	4:22:58 PM	H2 valve closed
3/27/2010	4:22:58 PM	BCl3 valve closed
3/27/2010	4:22:58 PM	PH3 valve closed
3/27/2010	4:22:58 PM	SiCl4 pre valve closed
3/27/2010	4:22:58 PM	SiCl4 post valve closed
3/27/2010	4:22:58 PM	Main Vac valve closed
3/27/2010	4:22:58 PM	Bypass valve closed
3/27/2010	4:22:58 PM	Bubbler valve closed
3/27/2010	4:22:58 PM	Helium MFC set to  0.000000
3/27/2010	4:22:58 PM	H2 MFC set to  0.000000
3/27/2010	4:22:58 PM	BCl3 MFC set to  0.000000
3/27/2010	4:22:58 PM	SiCl4 MFC set to  0.000000
3/27/2010	4:22:58 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	4:22:59 PM	Tube furnace set to 0
3/27/2010	4:23:19 PM	Bypass valve opened
3/27/2010	4:23:20 PM	Bypass valve closed
3/27/2010	4:23:21 PM	Bypass valve opened
3/27/2010	4:23:22 PM	Bypass valve closed
3/27/2010	4:23:23 PM	Bypass valve opened
3/27/2010	4:23:24 PM	Bypass valve closed
3/27/2010	4:23:25 PM	Main Vac valve opened
3/27/2010	4:23:26 PM	Main Vac valve closed
3/27/2010	4:23:27 PM	Main Vac valve opened
3/27/2010	4:23:28 PM	Main Vac valve closed
3/27/2010	4:23:28 PM	Main Vac valve opened
3/27/2010	4:23:29 PM	Main Vac valve closed
3/27/2010	4:23:41 PM	SiCl4 post valve opened
3/27/2010	4:23:42 PM	SiCl4 post valve closed
3/27/2010	4:42:26 PM	Program started after a nonstandard shutdown
3/27/2010	4:42:26 PM	Helium valve closed
3/27/2010	4:42:26 PM	H2 valve closed
3/27/2010	4:42:26 PM	BCl3 valve closed
3/27/2010	4:42:26 PM	PH3 valve closed
3/27/2010	4:42:26 PM	SiCl4 pre valve closed
3/27/2010	4:42:26 PM	SiCl4 post valve closed
3/27/2010	4:42:26 PM	Main Vac valve closed
3/27/2010	4:42:26 PM	Bypass valve closed
3/27/2010	4:42:26 PM	Bubbler valve closed
3/27/2010	4:42:26 PM	Helium MFC set to  0.000000
3/27/2010	4:42:26 PM	H2 MFC set to  0.000000
3/27/2010	4:42:26 PM	BCl3 MFC set to  0.000000
3/27/2010	4:42:26 PM	SiCl4 MFC set to  0.000000
3/27/2010	4:42:26 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	4:42:26 PM	Tube furnace set to 0
3/27/2010	4:42:31 PM	Main Vac valve opened
3/27/2010	4:42:31 PM	Main Vac valve closed
3/27/2010	4:42:32 PM	Main Vac valve opened
3/27/2010	4:42:32 PM	Main Vac valve closed
3/27/2010	4:43:11 PM	Bypass valve opened
3/27/2010	4:43:12 PM	Bypass valve closed
3/27/2010	4:44:35 PM	Helium valve opened
3/27/2010	4:44:36 PM	Helium valve closed
3/27/2010	4:44:49 PM	Helium valve opened
3/27/2010	4:44:50 PM	Helium valve closed
3/27/2010	4:45:18 PM	H2 valve opened
3/27/2010	4:45:19 PM	H2 valve closed
3/27/2010	4:45:45 PM	SiCl4 pre valve opened
3/27/2010	4:45:47 PM	SiCl4 pre valve closed
3/27/2010	4:46:15 PM	SiCl4 post valve opened
3/27/2010	4:46:16 PM	SiCl4 post valve closed
3/27/2010	4:46:40 PM	BCl3 valve opened
3/27/2010	4:46:40 PM	BCl3 valve closed
3/27/2010	6:28:49 PM	Program started after a nonstandard shutdown
3/27/2010	6:28:49 PM	Helium valve closed
3/27/2010	6:28:49 PM	H2 valve closed
3/27/2010	6:28:49 PM	BCl3 valve closed
3/27/2010	6:28:49 PM	PH3 valve closed
3/27/2010	6:28:49 PM	SiCl4 pre valve closed
3/27/2010	6:28:49 PM	SiCl4 post valve closed
3/27/2010	6:28:49 PM	Main Vac valve closed
3/27/2010	6:28:49 PM	Bypass valve closed
3/27/2010	6:28:49 PM	Bubbler valve closed
3/27/2010	6:28:49 PM	Helium MFC set to  0.000000
3/27/2010	6:28:49 PM	H2 MFC set to  0.000000
3/27/2010	6:28:49 PM	BCl3 MFC set to  0.000000
3/27/2010	6:28:49 PM	SiCl4 MFC set to  0.000000
3/27/2010	6:28:49 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	6:28:50 PM	Tube furnace set to 0
3/27/2010	6:29:00 PM	Bypass valve opened
3/27/2010	6:29:00 PM	Bypass valve closed
3/27/2010	6:29:00 PM	Bypass valve opened
3/27/2010	6:29:01 PM	Bypass valve closed
3/27/2010	6:29:02 PM	Bypass valve opened
3/27/2010	6:29:15 PM	Bypass valve closed
3/27/2010	6:29:32 PM	Bypass valve opened
3/27/2010	6:29:33 PM	Bypass valve closed
3/27/2010	6:29:33 PM	Bypass valve opened
3/27/2010	6:29:34 PM	Bypass valve closed
3/27/2010	6:29:34 PM	Bypass valve opened
3/27/2010	6:29:34 PM	Bypass valve closed
3/27/2010	6:32:19 PM	Program exited cleanly
3/27/2010	7:22:04 PM	Program started normally
3/27/2010	7:22:04 PM	Helium valve closed
3/27/2010	7:22:04 PM	H2 valve closed
3/27/2010	7:22:04 PM	BCl3 valve closed
3/27/2010	7:22:04 PM	PH3 valve closed
3/27/2010	7:22:04 PM	SiCl4 pre valve closed
3/27/2010	7:22:04 PM	SiCl4 post valve closed
3/27/2010	7:22:04 PM	Main Vac valve closed
3/27/2010	7:22:04 PM	Bypass valve closed
3/27/2010	7:22:04 PM	Bubbler valve closed
3/27/2010	7:22:04 PM	Helium MFC set to  0.000000
3/27/2010	7:22:04 PM	H2 MFC set to  0.000000
3/27/2010	7:22:04 PM	BCl3 MFC set to  0.000000
3/27/2010	7:22:04 PM	SiCl4 MFC set to  0.000000
3/27/2010	7:22:04 PM	Bypass solenoid MFC set to  760.000000
3/27/2010	7:22:04 PM	Tube furnace set to 0
3/27/2010	7:22:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/27/2010	7:22:10 PM	Recipe started at 7:22 PM
3/27/2010	7:22:10 PM	Helium valve closed
3/27/2010	7:22:10 PM	H2 valve closed
3/27/2010	7:22:10 PM	BCl3 valve closed
3/27/2010	7:22:10 PM	PH3 valve closed
3/27/2010	7:22:10 PM	SiCl4 pre valve closed
3/27/2010	7:22:10 PM	SiCl4 post valve closed
3/27/2010	7:22:10 PM	Main Vac valve closed
3/27/2010	7:22:10 PM	Bubbler valve closed
3/27/2010	7:22:10 PM	Bypass valve opened
3/27/2010	7:22:10 PM	Helium MFC set to  0.000000
3/27/2010	7:22:10 PM	H2 MFC set to  0.000000
3/27/2010	7:22:10 PM	BCl3 MFC set to  0.000000
3/27/2010	7:22:10 PM	SiCl4 MFC set to  0.000000
3/27/2010	7:22:10 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	7:22:10 PM	Tube furnace set to 0
3/27/2010	7:22:45 PM	Helium valve closed
3/27/2010	7:22:45 PM	H2 valve closed
3/27/2010	7:22:45 PM	BCl3 valve closed
3/27/2010	7:22:45 PM	PH3 valve closed
3/27/2010	7:22:45 PM	SiCl4 pre valve closed
3/27/2010	7:22:45 PM	SiCl4 post valve closed
3/27/2010	7:22:45 PM	Bubbler valve closed
3/27/2010	7:22:45 PM	Main Vac valve opened
3/27/2010	7:22:45 PM	Bypass valve opened
3/27/2010	7:22:45 PM	Helium MFC set to  0.000000
3/27/2010	7:22:45 PM	H2 MFC set to  0.000000
3/27/2010	7:22:45 PM	BCl3 MFC set to  0.000000
3/27/2010	7:22:45 PM	SiCl4 MFC set to  0.000000
3/27/2010	7:22:45 PM	Bypass solenoid MFC set to  0.000000
3/27/2010	7:22:45 PM	Tube furnace set to 0
3/27/2010	7:22:46 PM	Run finished at 7:22 PM
3/27/2010	7:22:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
